4 Point Probe

An essential tool for semiconductor manufacturing industries

We are proud to represent Four Dimensions, Inc., manufacturers of advanced semiconductor probing systems since 1978. Their Four Point Probe and CVmap systems are found in hundreds of fabs and research institutions around the world.
Four Dimensions provide four point probes with an extended measurement range or sophisticated probing for compound semiconductors. 4D’s latest innovation is a Modified four point probe for measuring pn junction leakage and sheet resistivity in the same probing step meeting the requirements for ultra shallow junction probing.

Four Dimensions’ product line consists of needle four point probe systems and mercury probing systems.

Four point probe systems are for sheet resistivity measurements on a huge variety of materials including group-IV semiconductors, metals, and compound semiconductors, as well as new materials found in flat panel displays and hard disks. We offer conventional needle as well as Mercury four point probes.

4D’s ‘ Four Point Probe systems measure the sheet resistance / resistivity / thickness of a wide range of materials. We offer a wide range of models, options, and probe heads to suit your materials’, measurement, and budget needs. We can also tailor systems to your special requirements.

All the four-point probe systems (except computerless models) can be modified to measure the pn junction leakage of USJ (range 1E-9 to 1E-2 S/cm2).
The range can be extended up to 8E9 Ohms/square or 8E11 Ohms/square for poly Si or amorphous Si film sheet resistivity measurement.

Precise four point probe heads with special needle array, such as rectangular or parallelogram array are available.

280I Series Four-Point Probes

Designed to automate and streamline the testing process, these probes offer a perfect blend of functionality, versatility, and precision.

Automated Efficiency

Our 280I Series Probes are automated sheet resistivity meters, ensuring swift and reliable readings while minimizing the chances of manual errors. From the production floor to the research lab, they deliver consistent results with high repeatability.

Wide Resistivity Range

These probes can measure resistivity from 1 mOhm/square to 800 kOhm/square, with an extended range of up to 8×10^11 Ohm/square. Such versatility ensures they are ready to tackle a wide range of applications in various industries.

Temperature Compensation Option

The 280I Series Four-Point Probes offer a temperature compensation feature to ensure accurate measurements under varying environmental conditions. This feature adapts the readings to the surrounding temperature, ensuring precise resistivity results irrespective of thermal fluctuations.

Broad Substrate Compatibility

These probes are ready to measure up to 8″ wafers or 156mm x 156mm substrates, making them perfect for various semiconductor applications. Whether you’re working with small chips or large wafers, the 280I Series Probes ensure accurate results every time.

Stand-Alone and PC Controlled Systems

The 280I Series Four-Point Probes are available in both standalone and PC-controlled configurations. When paired with our comprehensive Automap software package, the PC-controlled system offers a smooth and user-friendly interface for data collection, analysis, and reporting.

To learn more about our 280I Series Four-Point Probes and their potential applications, please feel free to contact us. Our dedicated team is ready to provide further information and support, helping you choose the right tools for your needs.

For more information, visit the Four Dimensions Inc site.

333A Four-Point Probe For 300mm


  • Automated Sheet Resistivity Meter
  • 1 mOhm / square to 800 kOhm / square
  • extended range up to 8E11 W/sq
  • up to to 12″ wafer capability
  • Automap software package
  • SECS-II communication available
  • Automatic probe-head switching available

Facility requirements:

  • Power: 100 / 115 / 230 VAC, 50/60Hz, 1 kW
  • Vacuum 20 in. Hg
  • Footprint 333A (depth, width, height cover closed/open): 36″ x 20″ x 18″/35″ (91.5 cm, 51cm, 46cm89cm) plus room for desktop computer, monitor, printer, keyboard, mouse.

520 Four-Point Probe Series


  • Automated Sheet Resistivity Meter
  • Number of Measurement Sites: 1~9 or customzed up to 192
  • Single Measurement Range: 20 Ohm/sq to 400 Ohm/sq
  • Multiple Measurement Range: 2E-2 Ohm/sq to 4E+9 Ohm/sq
  • Size Accommodated (mm): 156×156 to 220×220, or customized
  • Measurement Time (9 sites/single range): <7 seconds
  • Measurement Repeatability: <0.5%
  • Electronic Accuracy: <0.05%
  • Automap software package
  • SECS-II communication available

Facility requirements:

  • Power: 100 / 115 / 230 VAC, 50/60Hz, 1 kW
  • Vacuum: -10psi
  • Compressed Air: >20psi
  • Footprint 520 (depth, width, height cover closed/open): 25″ x 25″ x 16″/32″ plus room for desktop computer, monitor, printer, keyboard, mouse.

680I Dynamic Four-Point Probe


  • Automated Sheet Resistivity Meter for III-V compound materials
  • dynamic AC waveform to overcome contact resistance problems
  • five point measurement available
  • 10 mOhm / square to 40 kOhm / square
  • up to to 8″ wafer capability
  • Automap software package

Facility requirements:

  • Power: 100 / 115 / 230 VAC, 50/60Hz, 200 W
  • Vacuum 20 in. Hg
  • Table Footprint (depth, width, height): 22″ x 20 ” x 14.5″ (55.9 cm, 50.8 cm, 36.8 cm)